CMP applications are characterized by low solid concentration and very fine abrasives. Darlly DL961 capsule filter is a product for advanced CMP applications that is specifically designed to reduce critical large particle counts in various applications, especially optimized colloidal silica, cerium dioxide and fine alumina slurries.

Features

• High stability, low resistance and long service life
  • DL961 capsule filter adopts multilayer nanofiber material, reducing the dead zone of filtration under the reasonable gradient structure, and the flow channel is improved, with high stability. The finer the fiber, the higher the porosity and the lower the resistance of the medium. The large gradient design increases particle loading capacity and provides persistent filtration without compromising filter retention performance.
• Low retention structure
  • Compact structure minimizes retention of seed particles, ensuring good discharge of any bubbles formed by hydrogen peroxide additives, and eliminating potential slurry drying.
• Simple installation and safety
  • The simple and disposable design for quick installation, eliminates downtime, minimizing exposure to air and reduc-ing mud waste when operating hazardous chemicals .

Specifications

Dimensional Drawings

Order Information

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